Design of a High - Resolution Microfluidic Microwave Mems Phase Shifter
نویسنده
چکیده
In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time. VC 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett 53:1902–1905, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/ mop.26127
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تاریخ انتشار 2011